【摘要】 设计了20 GHz聚合物光波导电光调制器CPW电极系统。制作和测试了分别用 Si、石英、玻璃做衬底的CPW电极系统。结果表明,石英衬底CPW电极质量最好,在中心电极宽度 W=20μm、电极间距G=50μm和电极厚3μm条件下,其实测损耗系数α0=0.32 dB·cm-1·GHz-0.5,实测微波等效折射率Nm=1.689,与理论值符合。在偏离此α0 和 Nm±10%的情况下,对于互作用区电极长度为 L=23.7 mm的调制器,估算带宽仍大于37 GHz。讨论了Si衬底CPW电极传输损耗很大的原因。更多还原

【Abstract】 The coplanar waveguide（CPW） electrodes for 20 GHz polymer electro-optic（E-O） modulator was designed.The CPW electrodes on the silicon,quartz and glass substrates have been fabricated and measured.The experimental results show that the behavior of CPW on the quartz is the best among them.The experimental value of the attenuation factor α₀ and effective microwave refractive index N_m is of 0.32 dB·cm^-1·GHz^-0.5 and 1.689 respectively and agree with the theoretical for the CPW electrode of W=20 μm,G=50 μm and thickness 3 μm on the quartz.The modulation band-width of the polymer modulator with the interaction length L=23.7 mm predicted by α₀ and N_m is more than 37 GHz,which is varieties in 1±10% range.The high loss of CPW on silicon was briefly discussed here.更多还原