【摘要】 针对基于微压印成形三维MEMS器件制造工艺多层压印的需要,开发了一套基于视频图像对正原理的压印光刻对准系统。硬件系统以显微镜头、CCD、图像采集卡和精密工作台为核心组成。为了使系统能适应不同厚度器件的对准,设计了长工作距离的显微镜头并使用透明模板。软件中采用亚像素相关模板匹配算法进行定位运算,算法误差小于0.2μm。通过采用选择有效区域和粗-细搜索法的策略对算法进行优化,提高了运算效率。系统性能实验分析表明,系统分辨精度达到0.2μm,能够满足2μm的对准精度要求。更多还原

【Abstract】 A micron-precision optical alignment system is developed for three-dimensional Micro Electro-Mechanical System(MEMS) device fabrication based on multi-layer imprint lithography.The system’s hardware is mainly comprised of a microscope,a CCD camera,a video image card and a precise positioning stage.The microlens with long work distance is designed and a transparent template is adopted in order to accommodate accurate aligning of devices with various thicknesses.Sub-pixel precision is obtained by adopting a sub-pixel correlation template matching algorithm.By introduction of an interest area detection and coarse-to-fine searching strategy,algorithm efficiency is enhanced.System performance is tested.Experimental results show that the measurement resolution is 0.2 micron,which meets the need of system overall alignment tolerance of 2 micron.更多还原