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新型激光跟踪测量系统的设计

Design of a novel laser tracking and measuring system

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【作者】 隋修武张国雄赵树忠刘丽亚

【Author】 SUI Xiu-wu, ZHANG Guo-xiong, ZHAO Shu-zhong, LIU Li-ya ( State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China )

【机构】 天津大学精密测试技术及仪器国家重点实验室天津大学精密测试技术及仪器国家重点实验室 天津300072天津300072天津300072

【摘要】 基于多边法原理,设计出一种新型的激光跟踪测量系统。该系统采用四象限光电池作传感器,准确地测量目标镜反射光线的位置,测量灵敏度为 200mV/mm;以双电机驱动的双轴单转镜作跟踪机构,结构简单,运动灵巧,立体转角约±35 °;模拟式 PID 与数字式 PID 相结合的控制方案,控制精度高,跟踪速度快。实验表明,系统跟踪速度优于 0.7m/s,综合测量精度 1.3μm 。

【Abstract】 A novel laser tracking and measuring system based on multi-beam principle is proposed. The system adopts a four-quadrant photoelectric cell as its sensor. The reflection light position of object mirror is accurately measured by the system with measuring sensitivity of 200mV/mm. With double-axis and single rotating mirror driven by double-motor as tracking mechanism, the structure of the system is simple, its motion is flexible and its solid corner is about ±35°. The control scheme combining analog PID with digital PID has a high control accuracy and fast tracking speed. Experimental results show that the tracking speed of the system is better than 0.7m/s and its measuring standard error is only 1.3μm.

【基金】 国家自然科学基金资助项目(59875064)
  • 【文献出处】 光电工程 ,Opto-electronic Engineering , 编辑部邮箱 ,2005年01期
  • 【分类号】TP274.5
  • 【被引频次】19
  • 【下载频次】444
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