【摘要】 采用等离子体辅助的低压金属有机化学气相沉积(LP-MOCVD)技术,在没有引入任何金属催化剂的条件下,在c平面的蓝宝石衬底上制备出高取向的ZnS纳米棒阵列。从样品的场发射扫描电镜(SEM)和透射电镜的照片(TEM)中可以看到,获得的ZnS纳米棒具有均一的直径和长度,其直径和长度约为60,400 nm;X射线衍射(XRD)和选区电子衍射(SAED)谱指出获得的ZnS纳米棒为单晶的六角结构。此外,在光致发光(PL)谱中还观测到了发光峰位于335 nm强的近带边发射。更多还原

【Abstract】 One-dimensional nanoscale semiconductor structures,such as nanowires,nanobelts,and nanorods,have attracted considerable attention due to their interesting fundamental properties and potential applications in nano-scale opto-electronic devices.ZnS,an important semiconductor compound,has wide bandgap energy of 3.7 eV at 300 K.It has been used as a host crystal material in photoluminescence（PL）,electroluminescence,mechanoluminescence,acousticluminescence,and thermoluminescence.ZnS also has wide applications in the fields of displays,sensors,lasers,and photocatalysis.The ZnS in nanoscale has been reported to have some characteristics different from the bulk crystal,which may extend its application range.Recently,various ZnS nanostructures had been synthesized,including,nanowires,nanosheets,nanobelts,nanorods,（nanoribbons,） and nanotubes etc.As a rule,ZnS nanostructures were grown using thermal evaporation method with Au catalyst following vapor-liquid-solid（VLS） growth mechanism usually.In VLS growth process,catalysts play an essential role by forming liquid alloy droplet to provide nucleation sites for nanostructure growth.However,even low impurity concentration will affect the physical properties of semiconductors and the unintentionally doped impurities are detrimental for the device fabrication.A catalyst-free method to grow vertical aligned ZnS nanorods array was reported.The ZnS nanorods were grown on c-plane Al₂O₃ substrate by plasma-assisted metalorganic chemical vapor deposition（p-MOCVD） without employing of any metal catalyst.The images of field-emission scanning electron microscope（SEM） and transmission electron microscope（TEM） show that the obtained ZnS nanorods have uniform diameter of 60 nm with the length about 400 nm.Selected-area electron diffraction（SAED） pattern and X-ray diffraction（XRD） pattern measurements indicate that the ZnS nanorod is single crystals with hexagonal structure.In photoluminescence（PL） spectrum of the nanorods,a strong near band-edge emission located at 335.92 nm was observed under the excitation of 325 nm,indicating that the nanorods are of high optical quality.更多还原