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溅射和激光淀积的ZnO多晶薄膜的结构和发光性质(英文)

Structure and photoluminescence of ZnO polycrystalline films grown by sputtering and pulsed laser deposition

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【作者】 XIONG Gang； UCER K B； WILLIAMS R T； TANG Ping； LIN Bi-xia； FU Zhu-xi；

【Author】 XIONG Gang~(1,2),UCER K B~1,WILLIAMS R T~1,TANG Ping~1,LIN Bi-xia~3,FU Zhu-xi~3(1 Department of Physics,Wake Forest University,Winston Salem,NC 27109-7507,USA;2 Pacific Northwest National Laboratory,P. O. Box 999,K8-88,Richland,WA 99352,USA;3 Physics Department, University of Science and Technology of China,Hefei, Anhui 230026, China)

【机构】 Department of Physics,Wake Forest University,Winston Salem,NC 27109-7507,USA； Pacific Northwest National Laboratory,P. O. Box 999,K8-88,Richland,WA 99352,USA,Department of Physics,Wake Forest University,Winston Salem,NC 27109-7507,USA,Department of Physics,Wake Forest University,Winston Salem,NC 27109-7507,USA,Department of Physics,Wake Forest University,Winston Salem,NC 27109-7507,USA,Physics Department, University of Science and Technology of China,Hefei, Anhui 230026, China,Physics Department, University of Science and Technology of China,Hefei, Anhui 230026, China；

【摘要】我们分别通过直流反应溅射及脉冲激光淀积法制备了ZnO多晶薄膜。X射线衍射结果显示出薄膜的c轴取向。原子力显微镜证实薄膜的多晶结构。两种方法制备的ZnO在光子激发下都发射较强的带边荧光。绿色荧光未被观察到。激光淀积在(001)硅表面的ZnO的发光源自“自由激子”辐射。激光淀积在(0001)氧化铝晶体表面的ZnO的发光机制则在相当宽的激发强度范围内都呈现出电子空穴等离子体(electron holeplasma)的复合特性。更多还原

【Abstract】 ZnO polycrystalline films were grown on Si（001） and Al₂O₃（0001） substrates by reactive sputtering and pulsed laser deposition in oxygen ambient. X-ray diffraction graphs showed c-axis orientation. Atomic force microscopy showed polycrystalline structure of films. Annealing substantially improved the grain size and c-axis orientation. Samples grown by both techniques exhibited band edge photoluminescence,while the green defect luminescence was not observed. The photoluminescence of ZnO samples grown on Si（001） is attributed to free exciton radiation, while luminescence of samples with similar grain size but grown on sapphire is attributed to electron-hole plasma recombination at a very broad range of excitation intensities.更多还原

【关键词】 ZnO； atomic force microscopy； sputtering； pulsed laser deposition； luminescence；
【Key words】 ZnO； atomic force microscopy； sputtering； pulsed laser deposition； luminescence；

【文献出处】电子显微学报 ,Journal of Chinese Electron Microscopy Society , 编辑部邮箱 ,2005年03期

【分类号】TB34
【下载频次】63

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