【摘要】 针对矩形波导微波化学反应器,在低气压,低功率,纯甲烷微波放电情况下,用朗缪尔探针测量了石英反应管内等离子体的分布,用热偶计测量了微波等离子体在空间的温度分布。在谐振腔中心位置,等离子体的空间温度可以达到829℃;而在等离子体边缘区域,空间温度仅为78℃。更多还原

【Abstract】 Discharge experiments were done in a rectangle guide microwave chemical reactor filling up with pure methane under low pressure, low power . The distribution of the microwave plasma were measured by Langmuir probe and the temperature distribution of the microwave plasma in quartz tube reactor by the thermal couple meter. At the centre of the microwave resonant cavity, the highest temperature of the plasma was 829℃, and at the edge the temperature was 78℃。更多还原