【摘要】 微电子机械系统是一种新兴技术,它几乎影响着每一个科学技术领域,如交通、无线通信、航天、化学以及光波系统。目前许多工业领域期待选用微电子机械系统来解决技术上的问题。以下简述了微电子机械系统技术的基础概念、所用材料、加工工艺等;重点综述了基于MEMS技术的通信器件及其应用。更多还原

【Abstract】 As a rising technology, MEMS has almost influenced each scientific field, such as traffic system, wireless communication, aviation, chemistry, and light-wave system. Nowadays, many problems in industrial field perhaps can be solved by MEMS technology. Firstly, this paper introduces the basic concept, materials used, fabrication technology about MEMS briefly. Then, communication devices based on MEMS technology and their applications are reviewed.更多还原