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波长计中运动导轨的稳速控制方法及实现
Controlling Means on Guide of Wavemeter in Uniform Motion
【摘要】 波长计要求导轨运行平稳,直线性好。导轨采用音圈电机拖动。音圈电机结构简单、维护方便、响应速度快。依据等效力学模型和等效电路模型,得到音圈电机位移-电压传递函数。采用PID调节器,实现音圈电机的稳速控制,满足波长计的运动要求。
【Abstract】 Wavemeter requires that the guide can move in uniform motion and along straight line.The guide is driven by voice-coil motor that have simple structure,is easily maintained and rapidly responses.According to equivalent mechanical model and circuit model,the displacement-voltage transfer function of voice-coil motor.With PID regulator,the guide can move in steady speed state,which meet demands of the wavemeter.
【关键词】 迈克尔逊干涉;
音圈电机;
传递函数;
PID;
稳速;
【Key words】 <Keyword>Michelson interference; Voice-coil motor; Transfer function; PID; Uniform motion;
【Key words】 <Keyword>Michelson interference; Voice-coil motor; Transfer function; PID; Uniform motion;
【基金】 国家自然科学基金资助项目(No.60490280)。
- 【文献出处】 电子工艺技术 ,Electronics Process Technology , 编辑部邮箱 ,2005年04期
- 【分类号】TH744.5
- 【被引频次】3
- 【下载频次】80