【摘要】 文中介绍基于光学差动法内反射原理的二维小角度传感器,具有体积小、精度高、结构简单、量程可调的特点。该传感器可用于运动物体的在线姿态测量与控制,提高超精密驱动及定位装置的在线检测水平。更多还原

【Abstract】 In this paper, a two-dimension micro angular sensor based on the effect of internal reflection principle and opti- cal differential method is introduced. The sensor is miniaturized, high accuracy, compact and easy to adjust. It can be used for online orientation measurement & control of moving target of precise machining tools. The online test level of ultra preci- sion driving and position is improved by this method.更多还原