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湿敏半导体陶瓷阻–湿特性的研究
Study on Resistance-humidity Characteristics of Humid-sensing Semiconductor Ceramic
【摘要】 定量分析了多孔半导体陶瓷低湿度范围内的湿敏机理,通过理论推导,得出电阻与相对湿度关系的解析表达式。湿度较低时,半导体陶瓷中起主要作用的是电子电导。假定吸附表面态由吸附氧离子构成,表面态吸附水分子后,向体内发射电子,用统计理论对这一过程进行推演,得出了阻–湿关系表达式。结果表明:在低湿度区(x<10%),表达式与文献提供的TiO2材料的实验数据吻合良好。
【Abstract】 Analyzed was the humid-sensing mechanism of porous semiconductor ceramic in low humidity range. And the relationship equation between resistance and relative humidity was also obtained. When relative humidity was below 10%, the electron conductance plays primary role in semiconductor ceramic. The adsorbing surface layer consists of O?2 . After the layers adsorb water molecule, it launches electrons into the body. The process is explained by statistic theory, and above-mentioned equation coincides with data provided in reference [9].
【Key words】 electronic technology; porous semiconductor ceramic; relative humidity; surface absorption;
- 【文献出处】 电子元件与材料 ,Electronic Components $ Materials , 编辑部邮箱 ,2005年01期
- 【分类号】O472
- 【被引频次】7
- 【下载频次】289