【摘要】 用磁控溅射方法制备了Cu,Mo和Al基体的SmCo颗粒薄膜.用能谱EDAX,透射电镜TEM和振动样品磁强计VSM分别表征和测量了薄膜的结构和磁性能.结果表明,Cu基体溅射态已晶化而Mo和Al溅射态为非晶态,在500℃回火30 min后磁性相的析出特性有一定差异.对溅射的SmCo薄膜在500℃回火30 min后,Cu基体的SmCo薄膜磁性能较好,并有一定的磁各向异性,其原因是Cu在SmCo晶界的聚集对晶粒有钉扎作用.更多还原

【Abstract】 SmCo/Cu, SmCo/Mo, SmCo/Al magnetic granular films were fabricated by different DC magnetron sputtering. The mean compositions of the films were investigated with EDAX. The magnetic properties of the films were tested by VSM. The Microstructures of the films as-deposited and annealed at 500 ℃ for 30 min were observed by TEM. The results show that the SmCo/Cu granular films as-deposited are already crystal as sputter whereas the SmCo/Mo and SmCo/AI granular films as-deposited are amorphous. After annealed at 500 ℃ for 30 min, the magnetic precipitated phases are different. The different magnetic matrix show different magnetic properties and the film with the Cu matrix has the best magnetic properties in those matrix. The reason is that the Cu can gather and anchoring in the grain boundary.更多还原