【摘要】 半导体的噪声成分估计是利用噪声进行器件可靠性筛选的前提条件.为此,组建了一套基于虚拟仪器的半导体噪声测试系统.在应用该系统对大量的光电耦合器件(OCD)进行测试基础上,提出了采用LabVIEW对实测噪声功率谱进行噪声成分估计及参数拟合的新方法.该方法的特点是不需要被测器件低频噪声的先验知识,为改进OCD及其他半导体器件的生产工艺和提高器件的可靠性提供了指导性的数据.更多还原

【Abstract】 <Abstrcat> The noise components estimation of semiconductors is the precondition of reliability screening of semiconductor devices using noise measurement. Therefore a noise-measurement system for semiconductors based on virtual instrument was established. On the base of measuring a great deal of optoelectronic coupled devices (OCDs), which is very useful in many areas, a novel method that can estimate the noise components by PSD of the noise and carry though noise parameters fitting using LabVIEW was proposed. It is the characteristic that we can use the measurement without prior knowledge low frequency noise about semiconductors, which provides the probability to improve production techniques and reliability of OCD and other semiconductor devices.更多还原