【摘要】 用射频等离子体化学气相沉积法(RF-PECVD)制备了含氢类金刚石薄膜(DLC)。采用表面轮廓仪和纳米压痕仪分别测量膜的厚度和硬度。通过控制摩擦环境气氛对DLC薄膜和钢球对磨的摩擦系数进行了系统研究。利用光学显微镜和扫描电镜(SEM)分析了磨痕及磨斑的形貌,对DLC薄膜在不同气氛下的摩擦现象进行了表征和解释。结果表明,DLC薄膜的摩擦学行为与气氛中的O2、H2O和N2有关,其中N2的存在是DLC薄膜具有超低摩擦系数的重要原因。更多还原

【Abstract】 Diamond-like carbon films were prepared by RF-PECVD. Thickness and hardness were determined by Profile Tester and Nanotester. Frictional behavior of DLC films was studied in various atmospheres. It was found that ambient gas plays an important role in the friction, and N₂ is the important factor for the low friction coefficient of DLC films. The wear track and wear scar were observed by optical microscope and electron microscope. Some reasonable explains were put forward.更多还原