【摘要】 论述了非晶硅薄膜的几种主要再结晶技术 ,着重指出了各种晶化技术已取得的研究成果、优缺点、有待进一步研究的内容及其在多晶硅薄膜太阳电池工业生产中的应用前景。另外 ,还讨论了通过Raman光谱求纳晶硅薄膜的晶粒尺寸和结晶度的方法。更多还原

【Abstract】 Several basic recrystallization techniques of a-Si:H thin films were introduced and discussed. The emphasis was putted on the research results achieved, the advantage and disadvantage of various recrystallization techniques ,the contents that will be further studied and the application probability of them in the industry productivity of polysilicon thin-film solar cells. In addition, the method of calculating the grain size and crystalline fraction of nanoscale silicon thin films through Raman spectrum was discussed.更多还原