【摘要】 本文研究用平头压痕试验确定薄膜 基体材料中薄膜材料弹塑性参数的可行性 ,重点研究了薄膜材料的屈服强度和硬化模量的确定方法。利用有限元 (FEM)进行了模拟计算 ,给出了平头压痕下典型的等应力分布 ,以及载荷 压入深度的曲线。通过对载荷 压入深度曲线的研究 ,给出了通过平头压痕试验确定薄膜屈服强度和薄膜硬化模量的方法。更多还原

【Abstract】 The present paper explores the possibilities of determining the elastic-plastic parameters of thin films in the thin film-substrate systems using indentation testing with the flat cylindrical indenter. Emphasis focuses on the yield strength and hardening modulus of the thin film. Based on load-indentation depth curves, the method of determining the thin film yield strength and hardening modulus is presented by the indentation experiment with the flat cylindrical indenter.更多还原