【摘要】 ITO 透明导电薄膜以其优良的透明导电性能在平面液晶显示(LCD)、电致发光(EC)等多个领域得到了广泛的应用。制备 ITO 薄膜的方法很多,其中采用溶胶-凝胶法制备 ITO 透明导电薄膜具有成本低,设备简单,工艺可控,有利于大面积成膜等优点,因而受到了广泛的关注。较详尽地介绍了 ITO 薄膜的透明导电机理、溶胶-凝胶法的工艺特征,并初步论述了溶胶-凝胶法制备 ITO 透明导电薄膜的应用和发展前景。更多还原

【Abstract】 ITO thin films are widely used in LCD、EC fields because of their transparent and conductive attributes. There are many ways to fabricate ITO film,the sol-gel method has many advantages,such as low cost,simple equipment,easy control and large scale coating,so this method has received much attention.In this article,the principle of ITO films transpar- ent and conductive attributes,the characters of sol-gel technique to fabricate ITO film are introduced in detail,its research de- velopment and application are also discussed preliminarily.更多还原