【摘要】 报道了采用真空化学气相沉积法制备的聚对二甲苯薄膜和采用溶胶-凝胶技术制备的二氧化硅增透膜,通过提拉镀膜法在聚对二甲苯薄膜表面镀制 SiO₂增透膜得到的双层膜可应用于 KDP 晶体的增透保护膜。用 FT-IR、紫外-近红外分光光度计对聚对二甲苯/SiO₂薄膜的结构和光学性能进行了表征和测试。双层膜的透射率达到92%以上,激光损伤阈值为8J/cm²。镀有保护膜的 KDP 晶体在相对湿度稳定的环境下放置半年多后透射率基本保持不变。更多还原

【Abstract】 Parylene film prepared by vacuum chemical vapor deposition process and SiO₂ reflective film pre- pared by sol-gel technology were reported in this paper.By dip-coating process,parylene film could be associated with SiO₂ AR-coating to act as protective film of KDP crystal.FT-IR spectra,UV-visible spectra are used to charac- terize the structure and optical property of films.The transmittance of composite films can reach above 92% and the laser damage threshold is 8J/cm².The KDP crystals with protective film can maintain the transmittance after having been put in air for more than half years.更多还原