【摘要】 超硬多层薄膜的性能随调制周期的变化而发生变化,在某一范围出现超模、超硬等异常效应。由于其潜在的实际应用价值及理论意义,超硬多层薄膜成为近年来人们研究的热点。综述了近年来国内外学者对超硬多层薄膜的研究结果,介绍了其超硬多层薄膜类型、主要性能特点以及制备工艺,并对未来的发展趋势进行了展望。更多还原

【Abstract】 A review was given on the current status and prospects about the study of ultra-hard multilayer film. The types, properties, and preparation technology of the ultra-hard multilayer film were introduced, and the perspectives in those aspects were suggested as well. It was pointed out that the properties of the ultra-hard multilayer films varied with varying modulation period, and the anomalous super-high modulus and hardness were thus observed. At the same time, it was the potential practical and theoretical values of the ultra-hard multilayer films that were attracting much attention in the relevant research fields.更多还原