【摘要】 到目前为止,扫描探针显微镜(SPM)有近20年的发展历史。从发明初期的单一接触工作模式发展到包括可以测量粘弹性的相位模式在内的多种工作模式,同时通用型方面也高度发展,形成了一个庞大的高度自动化的SPM家族。在这个家族中,高度环境控制的SPM的出现,很好的解决了各种条件下对样品的原位观察。新近出现的各种显微镜集成的SPM系列是这个家族中的新成员,可以同时完成大范围、高分辨和精确定位等各种研究,在半导体制造过程中的异物检查、金属和绝缘体等表面测定以及生物大分子研究等方面发挥了重要作用。本文对SPM的进展作一综述。更多还原

【Abstract】 Scanning probe microscope (SPM) has been developed for nearly 30 years, from the single contact mode in the earlier period to multimode includin g phase image mode that can measure the sample viscoelasticity, which will satis fy the need of different researches, and then formed into a big family of highly automatic scanning probe microscopes. In this family, a highly environment-cont rolled SPM becomes a newcomer, which satisfies various observations in situ. As an important new member, another highly-integrated SPM can complete wider scan, high resolution, precise re-location and other studies, which will play an impor tant role in checking foreign body, measuring surface of metals and insulators a s well as in the research of bio-macromolecules. This review summarizes the adva nce of scanning probe microscopy.更多还原