【摘要】 本文介绍了一种以整体线切割设计的音圈电机为驱动的聚焦式位移传感器,它具有良好的静动态特性。通过音圈电机以两次精确找焦的方法来确定焦点的位置,同时配合数字伺服控制方法并对于不同的材料表面及在有一定角度的表面检测失焦时进行特殊处理,能使得该传感器能够精确快速找到焦点。更多还原

【Abstract】 An integer linear-incising designed focusing electric machinery sensor drive by voice coil is introduced,and it has excellent stillness/dynamic characters.By means of twice precisely focusing,it can locate the point of focus.Furthermore,cooperating with digital servo-control method and compensating for losing focus on some special surface,this sensor can swiftly find the focus.更多还原