【摘要】 介绍了一种用于差分电容检测前置电路的开关电路,该电路使信号易于解调而能简化信号处理电路。阐述了电路的工作原理及相关特性,在250 kHz的载波频率下,给出了Hsp ice仿真结果及其具体在微机械加速度计中的应用。实际结果表明:样品的灵敏度为16~25mV/gn,非线性为0.1%~0.5%,满足技术要求。更多还原

【Abstract】 A new kind of pre-circuit for differential capacitance test is introduced,which is constructed by a switched circuit.This circuit can bring facility to signal demodulation and predigest the signal processing circuit greatly.The circuit’s operation mechanism and its characteristics are investigated.The Hspice simulation results with Hspice and application in the micro-accelerometer,under the 250 kHz carrier wave are offered.The results show sensitivity of the sample is 16~25 mV/g_n and linearity is 0.1 %~0.5 %.It can meet the meeds of technology.更多还原