【摘要】 阐述了金属氧化物微气体传感器制备技术的最新研究进展,介绍了气体传感器的气敏膜表面化学处理、气氛沉积、复合气敏膜、热氧化成膜技术、异形电极技术、显微铸造微传感器阵列技术和溶胶凝胶提拉成膜技术,分析了各自的特点,并提出了存在的问题和今后的发展方向。更多还原

【Abstract】 New progress of research on the preparation technique of micro gas sensors of metal oxide semiconductors is introduced,such as the chemical treatment of the gas sensing film,the deposited technique of gas sensing film in the oxygen radical assisted EB evaporation,the technique of the mulit-layered thick film,the fabrication technique of the thermally oxidized,the technique of the electrode configuration,the fabrication technique of the miniaturized arrays by micromolding in capillaries,the dip-coating of the sol-gel,and the existent problem and the development direction in future are pointed out.更多还原