【摘要】 利用微机电系统(MEMS)技术,制作了一种新型传感器阵列。首先,在刚性衬底上制作了一种8×8切应力传感器阵列,然后,利用硅岛阵列技术制作了一种柔性结构。试验结果表明:所制作的柔性传感器阵列经多次弯扭循环后,电阻值基本没有变化,柔性传感器在经过弯扭3300次后,传感器本身的柔性材料并没有断。更多还原

【Abstract】 Based on microelectromechanical systems(MEMS) technology, a 8×8 elements micro flexible sensor array is fabricated.A shear stress sensor is firstly manufactured on rigid Si substrate,then a silicon islands array is made on the backside of the substrate,which forms a flexible structure.The test results show that the resistance of the sensors is changed little after the bending test and the flexible structure is not broken after 3300 times bending.更多还原