【摘要】 用真空气相沉积法在玻璃衬底上制备纯SnO2和掺稀土Nd的SnO2薄膜,在500℃氧气气氛条件下进行45min热处理,获得良好的纳米SnO2薄膜和掺稀土Nd的SnO2薄膜。结果显示掺Nd和热处理使纳米SnO2薄膜的结构、导电性能得到一定的改善。掺Nd5%的SnO2薄膜对气体的选择性和灵敏性均得到明显的改善,其中,对丁烷的选择性、灵敏度最好,在体积分数为7.2×10-3时,灵敏度可达到340,但对乙醇、丙酮气体的敏感性较差。更多还原

【Abstract】 SnO₂ thin films and Nd-doped SnO₂ thin films are prepared by vacuum evaporation on glass substrates to obtain the nano-SnO₂ films at 500℃ with 45min of heat-treatment in O₂.The results show that the structure and electric characteristics of the nano-SnO₂ films are improved by heat-treatment and doping,the gas selectivity and gas sensitivity characteristics of SnO₂ films by doping 5% Nd are also improved.The maximum sensitivity of above SnO₂ thin films to butane can increase up to 340 at volume fraction of 7.2×10 -3 .But the sensitivity to alcohol,acetone is low.更多还原