【摘要】 非制冷双材料红外探测器具有高响应率和低噪声的特点,噪声等效温差接近理论极限。其灵敏度高的基本原理是基于一个比较大的双层材料热膨胀系数和杨氏模量差,通过双材料悬臂结构可以把热转换成机械运动。经过采用ANSYS软件进行有限元模拟,得出材料厚度比与灵敏度、极板位移与电容变化的关系曲线。同时,模拟分析了不同悬臂尺寸的几何模型,得出了相应的优化结构。更多还原

【Abstract】 Uncooled bi-material infrared detectors have the potential of approaching the theoretical limit of noise equivalent difference in temperature because of its high sensitivity and low noise.The fundamental basis of the high sensitivity lies in the bi-material’s large difference of thermal expansion and Young’s modulus,and the bi-material element can convert heat into mechanical movement.Bi-material cantilever beam is simulated by ANSYS.The relation curves of beam thickness ratio vs temperature sensitivity and plate displacement vs capacitance change are presented.Different geometry schemes on optimal design of the infrared detector are also discussed.更多还原