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多壁碳纳米管湿敏传感器的研究
Research into Humidity Sensors Based on Multi-Wall Carbon Nanotubes
【摘要】 传感器的基底为Al板电化学氧化成Al2O3绝缘层模板,上面真空溅射了叉指金电极,在电极之间旋涂微量多壁碳纳米管的水悬浊液,干燥后作为敏感膜。室温下测试传感器暴露在不同湿度的电阻变化,发现吸附了H2O后传感器的导电能力降低,且下降的幅度与被测湿度有良好的梯度关系。同时该多壁碳纳米管再经缩合剂EDC修饰后旋涂于电极上形成的敏感膜对湿度呈指数级变化。对它们的湿敏响应的机理进行了一些初步的探讨。
【Abstract】 The humidity characteristics of the multi-wall carbon nanotube films was studied.A sensor based on multi-wall carbon nanotube was developed for humidity detection at room temperature.The electrical conductivity of the dried carbon nanotube film decreased when the electrode was exposed to higher relative humidity(RH) atmosphere.And there is a good correlation between the increasing resistance amplitude and the RH.In addition,when Multi-wall carbon modified with the coupling agent 1-(3-(dimethylamino)propyl)-3-ethylcarbodiimide hydrochloride(EDC),the reaction to different RH surrounding is remarkable.Their mechanism of humidity characteristics were discussed.
【Key words】 multi-wall carbon nanotube; gas sensor; relative humidity; saturated salt solution; EDC;
- 【文献出处】 传感技术学报 ,Journal of Transcluction Technology , 编辑部邮箱 ,2005年04期
- 【分类号】TP212
- 【被引频次】18
- 【下载频次】504