【摘要】 分析了梳齿电容式传感器在三种电容驱动方式下,梳齿电容极板的不平行对传感器受到阶跃加速度信号作用时可靠工作条件的影响。得到了梳齿倾斜效应对传感器阶跃加速度响应影响的分析模型。结果表明梳齿电容在同样的电压驱动下,若电容极板的倾斜角变到0.5°时,对于单边电容结构、双边电容结构和有力反馈的双边电容结构,传感器能够承受的临界阶跃加速度分别变为电容极板完全平行时的0.34、0.44、0.52。并针对DRIE工艺刻蚀梳齿的原理,讨论了改进梳齿不平行的方法。更多还原

【Abstract】 The effect of non-parallel combs of the micromechanical sensor on the reliable operation condition in three capacitive accelerometer configurations is investigated.The model for analyzing the effect of non-parallel combs is found.It is found that at the same drive voltage,the reliable operation ranges of the sensors for the single capacitor,double-sided capacitor and force-balanced capacitor are diminished to 0.34,0.44,0.52,respectively when the angle of decline is changed from 0° to 0.5°.The method to diminish the effect of non-parallel is also investigated.更多还原