【摘要】 世界各国十分重视超光滑表面光学元件的加工与检测技术的研究。本文阐述了超光滑表面在诸多科技领域的应用,并结合超环面光学元件检测的实例,研究了同步辐射超光滑光学元件的检测技术,其中包括大曲率半径、面形误差和表面粗糙度的检测。更多还原

【Abstract】 Every country in the world researcher all regard fabrication and testing of super-smooth surface of optical element. In this paper,we presents the application of the super-smooth surface in a great deal of scientific and technological fields. And combines with the instance of the toroidal optical element, research the testing technology of super-smooth surface of the synchronous radiation optical elements, including the measurement of large curvature radius, the shape error and the roughness of surface.更多还原