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纳米二氧化钛薄膜制备研究进展

Research Progress in Preparation of the Nano TiO₂ Thin Films

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【Author】 CHENG Xiao-ling~(1,2), HU She-jun~(3), KUANG Tong-chun~(4),ZENG Peng~(2), XIE Guang-rong~(2), RU Qiang~(2)(1.Analytical and Testing Center, Guangdong University of Technology, Guangzhou 510090, China;2.School of Materials and Energy Sources, Guangdong University of Technology, Guangzhou 510090, China;3. School of Physics and Telecommunication Engineering, South China Normal University, Guangzhou 510631, China;4.Analytical and Testing Center, South China University of Science & Technology, Guangzhou, 510640, China)

【机构】广东工业大学分析测试中心；华南师范大学物理与电信工程学院；华南理工大学分析测试中心；广东工业大学材料与能源学院；广东工业大学材料与能源学院广东工业大学材料与能源学院；广东广州510090；广东广州510631；广东广州510640；广东广州510090；

【摘要】根据近年来国内外TiO2功能薄膜的研究现状,对化学气相沉积法、水解-沉淀法、液相沉积法、溶胶-凝胶法、溅射法、离子束辅助沉积法等化学和物理制备方法的研究进展进行了综述,并对其优缺点进行了比较和评述。更多还原

【Abstract】 Based on the current study state of TiO₂ functional thin film,the preparation methods of titania thin films including chemical vapor deposition,hydrolysis-precipitation,liquid phase deposition,sol-gel dip-coating,sputtering,ion beam enhanced deposition were reviewed.The advantages and disadvantages of different methods were briefly described.[更多还原