【摘要】 在约定的工作条件下,列出了MEMS多层悬梁微执行器热传递方程和初始条件、边界条件,并得到解析解,建立了电-热分析模型.利用Matlab软件包和ANSYS软件包分别进行解析解分析和三维有限元分析,并进行比较.结果表明在500K附近静态/稳态工作时,对于材料层厚度di<b L,i=1,2,3,得到温度分布沿长度方向不一致,沿宽度方向一致.解析模型与有限元分析的误差可以小于5%,说明多层悬梁微执行器二维电-热解析模型是有效的.更多还原

【Abstract】 <Abstrcat> Under the designated condition of operation, the heat transfer equation of the MCMA and its initial condition, boundary conditions are listed, the analytical solution is derived and the electro-thermal analytical model is set up. Comparison is made between the analytical solutions by Matlab software package and the 3-D FEA by ANSYS software package at static/steady state. Around temperature 500 K, for the material layer thicknesses, d_i<bL,i=1, 2, 3, the static/steady temperature distribution along the MCMA’s width is in uniform and that along its length is not in uniform; the relative error of analytical model compared to FEA can be less than 5%. The 2-D electro-thermal analytical model of the MCMA is effective.更多还原