【摘要】 在分析pnp隔离的逆导型GCT(RCGCT)特性的基础上,提出了沟槽隔离的RCGCT新结构,并给出了其阻断特性的设计方法.依此建立了RCGCT的结构模型,利用MEDICI软件对其阻断特性进行了模拟,并与非对称GCT和pnp隔离的RCGCT的阻断特性进行了比较和分析.另外,通过对不同沟槽结构参数下RCGCT的阻断特性和门极击穿特性的模拟,给出了沟槽区的优化参数.实验结果证明了设计的合理性.更多还原

【Abstract】 The blocking characteristic of a conventional RC-GCT with pnp separation region is analyzed.A new RC-GCT structure with trench separation region is presented and the design considerations of its blocking characteristic are given.Based on the results,the structural model of RC-GCT with trench separation region is set up,and its blocking characteristic is simulated using a MEDICI simulator and compared with that of the asymmetry GCT without separation region and RC-GCT with pnp separation region.In addition,the optimum parameters of trench separation region are given by simulating characteristics of the RC-GCT for various trench structural parameters.The experiment results show that the design for the RC-GCT is reasonable.更多还原