【摘要】 采用部分元等效电路方法,结合近似的三维闭式格林函数,在10GHz以下的频率范围提出了一种针对有耗硅衬底上螺旋电感的准静态建模新方法.该方法充分考虑了有耗的硅衬底、趋肤效应、接近效应等因素对螺旋电感电特性的影响,通过与全波分析方法对比,证明在相当宽的频率范围该方法是有效、可行的,可广泛应用于微波和射频硅集成电路的优化设计和仿真.更多还原

【Abstract】 A novel quasi-static method based on the partial element equivalent circuit method combined with an approximate three-dimensional closed-form Green’s function is proposed to model the spiral inductor on lossy silicon substrate below 10GHz.Some important effects to electronic characteristic of spiral inductors such as lossy silicon substrate,nonuniform current distribution due to skin and proximity effects within each segment are considered in the method.The validity of the method is proved by comparing with the results of full-wave analysis method among a comparatively large frequency range,so it is both efficient and feasible.It can be extensively used in the optimization design and simulation of microwave and RF integrated circuits.更多还原