【摘要】 研究了高质量超薄氮化硅/氮氧化硅(N/O)叠层栅介质的金属栅pMOS电容的电学特性,制备了栅介质等效厚度小于2nm的N/O复合叠层栅介质,该栅介质具有很强的抗硼穿通能力和低的漏电流.实验表明这种N/O 复合栅介质与优化溅射W/TiN金属栅相结合的技术具有良好的发展前景.更多还原

【Abstract】 Electrical properties of high quality ultra thin nitride/oxynitride(N/O)stack dielectrics pMOS capacitor with refractory metal gate electrode are investigated,and ultra thin (<2 nm) N/O stack gate dielectrics with significant low leakage current and high resistance to boron penetration are fabricated.Experiment results show that the stack gate dielectric of nitride/oxynitride combined with improved sputtered tungsten/titanium nitride (W/TiN) gate electrode is one of the candidates for deep sub-micron metal gate CMOS devices.更多还原