节点文献
液相外延HgCdTe薄膜组分的均匀性
Compositional Uniformity of LPE-HgCdTe Films
【摘要】 利用水平推舟液相外延法,以CdZnTe作为衬底,固态HgTe作为Hg补偿源,从富Te HgCdTe溶液中外延生长大面积 HgCdTe 薄膜.通过选择合适的温度和生长速率,获得了组分均匀性和重复性较好的大面积长波HgCdTe薄膜.
【Abstract】 HgCdTe films with large size are grown from Te rich solutions on CdZnTe substrate with sliding boat liquid phase epitaxial method.Solid HgTe is used to compensate the loss of Hg from the solution.Accurate temperature control and cooling rate are applied in the growth process.The result shows that the HgCdTe films have good uniformity and reproducibility of composition in spite of the large size.
- 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,2005年03期
- 【分类号】TN304.25
- 【被引频次】5
- 【下载频次】102