【摘要】 分析了梳齿电容式传感器梳齿极板间的不平行在三种电容驱动下 ,对传感器的可靠工作范围的影响 .结果表明梳齿电容在同样的电压驱动下 ,当电容极板间的倾斜角由 0 1°变到 0 5°时 ,单边电容结构和双边电容结构的可靠工作范围变为电容极板完全平行时的 0 4 5 ,0 5 6 .对力平衡的双边梳齿电容结构 ,当倾斜角由 0 1°变到 0 15°时 ,可靠工作范围分别变为原来的 0 92 5 .并针对DRIE工艺刻蚀梳齿的原理 ,讨论了改进方法 .更多还原

【Abstract】 The effect of non-parallel combs on the reliable operation range in three capacitive accelerometer configurations is investigated.It is found that at the same drive voltage,the reliable operation ranges of the single capacitor and double-sided capacitor are diminished to 0 45 and 0 56 respectively when the angle of decline is changed from 0 1° to 0 5°,the reliable range of force-balanced configuration is diminished to 0 925 when the angle of decline is changed from 0 1° to 0 15°.The method to diminish the effect is also investigated.更多还原