【摘要】 以微加工技术制作的薄膜体声波谐振器以及由它连接组成的滤波器为重点,介绍了其工作原理、结构模型以及相关参数,提出了一种薄膜体声波谐振器设计,并模拟了其构成射频带通滤波器的频率特性。更多还原

【Abstract】 We focus on the thin film bulk acoustic wave resonators and filters fabricated by micro-machining. The operation principle?structure model and main parameter are introduced. A design of thin film bulk acoustic wave filter is proposed,and frequency characteristics of a bandpass filter made of it is simulated.更多还原