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掺杂纳米SnO2气敏传感器的研究进展
Research Progress on Doped SnO2 Gas Nanosensors
【摘要】 介绍了半导体气敏传感器的发展历史和掺杂纳米SnO2气敏传感器的特性与应用;详细分析了掺杂金属单质、金属氧化物和稀土元素对SnO2气敏性的影响,通过掺杂可以显著改善其对特定气体的灵敏度、稳定性和选择性等参数;利用元件表面的氧吸附理论分析掺杂纳米SnO2的气敏机理;展望了SnO2气敏传感器的发展前景。
【Abstract】 The development history of semiconductor gas sensors,the properties and application of doped SnO2 gas nanosensors are introduced. Effects of doping metals,metal oxides and rare-earth on the gas sensitivity of SnO2 are thoroughly analyzed. Sensitivity,stability and selectivity of gas sensor towards special gases can be greatly improved through doping. The gas-sensing mechanism of doped SnO2 nanosensors is analyzed using the oxide adsorption theory on the sensor surface. Development prospect of SnO2 gas sensors is also pointed out.
【基金】 国家自然科学基金资助项目(50304014);湖南省科技攻关计划项目(03KGY3038);中南大学研究生教育创新工程资助项目(030702)
- 【文献出处】 微纳电子技术 ,Micronanoelectronic Technology , 编辑部邮箱 ,2005年04期
- 【分类号】TP212
- 【被引频次】48
- 【下载频次】1361