【摘要】 提出了一种基于标准件法的二次标定法,实现了对微距尺寸的高速高精度测量。该方法经过实验测量数据的分析对比,表明比标准件法测量精度有明显提高,满足了IC晶片线宽测量的精度要求。更多还原

【Abstract】 A method of twice measure based on the standard component is presented,high-accuracy measurement for micro size is obtained.Through analysis and contrast of the experimental results,this method was obviously improved the precision compared with the law of standard component,and met the wide precision demands that measures of chip line of IC.更多还原