【摘要】 介绍了电子显微镜和二次离子质谱仪(SIMS)两种当前主要的微分析工具在四元InGaAlP发光二极管(LED)外延片分析过程中的应用,讨论了它们各自的适用领域,指出两者有机的结合可以得到比较全面的分析结果,为工艺监控和工艺改进提供了参考。更多还原

【Abstract】 Applications of electron microscopy and secondary ion mass spectroscopy(SIMS) in analyzing the InGaAlP epitaxy wafer of LED were introduced.The application areas were discussed.A comprehensive result in the epitaxy wafer microanalysis by combining the two methods was obtained,and references to the process monitor and control are given.更多还原