【摘要】 在介绍OEE与TOC理论的基础上,将两者的优缺点互补,引入IEE概念进行瓶颈诊断,开展了TPM活动以提高系统整体效率,同时提出一宏观与微观相结合的企业数据收集与处理模型。结合目前国内半导体厂实时性差的特点,介绍了一晶圆制造过程实时系统工作流程。更多还原

【Abstract】 Based on theory of OEE and TOC, and combining their advantages, the conception of IEE(Intrinsic Equipment Efficiency)is used to locate the bottle-neck. TPM is carried out to increase the overall efficiency of the system. A two-layer model comprised macroscopic and micro- scopic for data collecting and analyzing is introduced. A workflow model of a real time system used in wafer fabrication is developed.更多还原