【摘要】 利用红外透射原理,即根据键合晶片中键合部分可以透光而未键合部分几乎不能透光的原理,同时采用冷光源的独特方法构建了键合质量测试平台以用于初步筛选符合下一步工艺探索的高质量键合晶片。更多还原

【Abstract】 Using the infrared transmission theory, which is to say that the bonding part of thesample can make the light pass, and the un-bonding part of the sample will block the light, at thesame time, the unique method of cold lamp-house is used to manufacture the instrument of testingthe wafer bonding quality in order to select the high quality one for the next technical research.更多还原