【摘要】 提出了一套功能较为完备的新型扫描电子束曝光机图形发生器的硬件设计方案。方案采用TMS320C6713 芯片作为核心单元,并由USB2.0 接口电路、存储器扩展电路、标记检测控制电路、曝光控制电路和束闸控制电路构成。方案具有数据处理能力强、速度快、接口方便等优势,克服了传统图形发生器单纯依靠软件完成、速度慢、精度低、工作不稳定的缺点。更多还原

【Abstract】 A versatile DSP-based pattern generator for e-beam lithography system is presented. We chose TMS320C6713 as the key part of the pattern generator. According to the requirement of different functions and performances, we formed the system with a certain hardware configuration, including interface unit, memory extension unit, mark signal detection control unit, expose control unit, E-beam control unit. The module has the advantages of flexible configuration, high program- mable ability and expansibility.更多还原