【摘要】 讨论了谐振腔增强型光探测器的优化设计方法。综合分析了腔长、DBR反射镜的反射率、吸收层厚度、入光面积等关键因素对探测器性能的影响。采用特定的顺序来确定器件的各个参数,同时分析了驻波效应、生长偏差等因素的影响。更多还原

【Abstract】 The design method of resonant cavity enhanced (RCE) photodetector is discussed,and the length of the cavity,reflectivity of DBR,width of the absorption layer and area of the incidence light are systematically analysed,which are the keys to improve the performance of the devices.At the same time,a novel method is used to calculate all the parameters of the devices and analyze the standing wave effect and growth error.更多还原