【摘要】 采用射频宽束离子源进行离子束辅助镀膜可以获得高性能的光学薄膜 ,已越来越得到人们的共识。本文对射频感应线圈的匹配、起弧及三栅离子光学的关键技术进行了重点考虑 ,并获得了稳定运行的高性能离子源。更多还原

【Abstract】 A novel type of broad beam radio frequency (RF) ion source has been developed to grow optical films by ion beam assisted deposition.Matching of the inductive co ils,discharge property of the ion source and the 3-grid optics were discussed.T he lab-made RF ion source displays stable and satisfactory performance.更多还原