【摘要】 不改变商用SIP的基本结构 ,把NEG组件WP1 2 5 0装入SIP ,构成 (SIP +NEG)的XHV复合泵。它使SIP和NEG的特点互补 ,综合性能优越。NEG激活前 ,SIP单独抽气 ,极限压强 1 1× 1 0 -8Pa。NEG激活后 ,SIP和NEG联合抽气 ,复合泵的极限压强降到 7× 1 0 -1 0 Pa ,抽速稳定的范围更广 ,标称抽速约是SIP抽速的 2 5倍更多还原

【Abstract】 A novel type of extra high vacuum (XHV) pump has been successfully developed by installing components of non evaporative getter (NEG),WP1250,into a commercial sputtering ion pumps (SIP) without altering its frame.The strengths of the new pump include:1.the upper limit of 1 1×10 -8 Pa of SIP is not a problem.the ultimate pressure can reach 7×10 -10 Pa after activating NEG;2 its constant pumping speed doubles that of SIP by activating NEG.更多还原