【摘要】 介绍了动态流导法真空校准装置的校准原理、校准方法,测试了性能指标,校准了分离规和磁悬浮转子规。实验结果表明,校准范围为(2 6×10-7～2 4×10-1)Pa,不确定度小于1 4%,磁悬浮转子规的校准结果与德国PTB的校准结果的一致性好于1 6%。更多还原

【Abstract】 Calibration principle and method of dynamic flow method vacuum calibration apparatus is introduced. Performance of the calibration apparatus is also studied in detail. The experiments for calibrating spinning rotor gauge and extractor gauge are accomplished. The result of experiment shows that calibration range of dynamic flow method vacuum calibration apparatus is from 2.6 10^-7 Pa to 2.4 10^-1 Pa with uncertainty is less than 1.4%.The spinning rotor gauge is calibrated by LIP（Lanzhou institute of physics）and PTB respectively. The difference of result is less than 1.6%.更多还原