节点文献
钨金属化与氧化铝陶瓷高温共烧
Tungsten Metallization and Alumina High Temperature Co-Firing
【摘要】 阐述了钨金属化与氧化铝陶瓷高温共烧工艺的特点,分析了烧结过程中温度曲线和露点等工艺参数对钨金属化与瓷件结合强度、密封气密性和收缩率的影响。通过反复的试验和烧结机理分析对比,给出了最佳的控制参数。
【Abstract】 The characteristics of tungsten metallization and alumina high temperature co-firing technology are explained,the influence of process parameters during sintering process (temperature curve and drew point) on bonding strength, hermetic properties, shrinkage was analyzed. Through repeating test and sintering theory is analyses, the best control parameters are given.
- 【文献出处】 真空电子技术 ,Vacuum Electronics , 编辑部邮箱 ,2004年04期
- 【分类号】TQ174
- 【被引频次】20
- 【下载频次】687