【摘要】 集成电路是现代信息社会经济发展的基础和核心 ,文章从IC产业的发展过程和现状出发 ,指出MEMS的微连接和系统组装已成为影响MEMS发展的关键技术。结合国内外用于MEMS系统微组装的高速高精度定位系统的研究现状与趋势提出 ,研发面向MEMS加工的高速高精度定位系统是推动MEMS发展的重要基础更多还原

【Abstract】 The integrate circuit has become the basis and core of the economy developing of modern information society. In this paper, based on the developing process and actualities of the IC industry, that the MEMS bonding has become the key technology which will affect the development of MEMS is put forward. Combining with the researching actualities of high precision orientation system used in MEMS manufacturing, it is pointed out that researching and developing the high precision orientation system used in MEMS manufacturing is the important basis which will accelerate the development of MEMS industry.更多还原