【摘要】 介绍了喷雾热解法制备薄膜技术,综述了喷雾热解法制备薄膜的研究进展,着重介绍了喷雾热解法制备铁电薄膜的研究,以及等离子体增强喷雾热解法制备薄膜技术。更多还原

【Abstract】 The spray pyrolysis technique used to prepare thin films was introduced in the paper. Therecent studies on the thin films prepared by spray pyrolysis were reviewed. Especially,ferroelectric thinfilms prepared by spray pyrolysis and plasma-enhanced spray pyrolysis technique were introduced in detail.更多还原