节点文献

光成形的光固化理论分析与实验研究

Theoretical Analysis and Experimental Research of Solidification Shapes for Stereo Photo Lithography

  • 推荐 CAJ下载
  • PDF下载
  • 不支持迅雷等下载工具,请取消加速工具后下载。

【作者】 马德盛王翔邬昶畅黄文浩

【Author】 Ma Desheng Wang Xiang Wu Changchang Huang Wenhao University of Science and Technology of China, Hefei,230026

【机构】 中国科学技术大学精密机械与精密仪器系中国科学技术大学精密机械与精密仪器系 合肥230026合肥230026

【摘要】 通过对高斯光斑的曝光固化理论分析 ,得到了固化物形状、大小与光强分布和曝光量的关系 ;利用光纤直接曝光固化实验 ,得到了紫外光固化树脂的临界固化能量和吸收系数两个特征值 ;通过Matlab的计算建模和固化实验分析 ,验证了理论分析的正确性 ,为后续的平面成形固化和三维结构成形固化提供了理论基础

【Abstract】 This paper discussess the relationship among the shape, size of the solidified photopolymer and the Power density, through the theoretical analysis of exposure and solidification by Gaussian beam. By the experiments of solidification with the UV optical fiber directly, two eigenvalues for UV photopolymer solidification, critical solidification energy and absorption coefficient were calculated. Eventually, by computation modeling with MATLAB and solidifying experiments, the theoretical analysis was proved. A useful theoretical foundation has made accordingly for the planar solidification and the stereo photo lithography.

【基金】 国家自然科学基金资助项目 (5 0 2 75 14 0 )
  • 【文献出处】 中国机械工程 ,China Mechanical Engineering(中国机械工程) , 编辑部邮箱 ,2004年18期
  • 【分类号】TN201
  • 【被引频次】17
  • 【下载频次】168
节点文献中: 

本文链接的文献网络图示:

本文的引文网络